Fusion of metrology data for large-scale high-volume manufacturing of polymer-based microfluidic devices
Shilpiekandula, Vijay, Burns, Daniel J., Li, Shiguang, Xu, Zhiguang, Taylor, Hayden K., Toumi, Kamal Youcef, Fang, Zhongping, Reading, Ivan, Yoon, Soon FattVolume:
3
Year:
2009
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2009.027505
File:
PDF, 790 KB
english, 2009