A novel polishing method using soluble fixed soft abrasive film
Zhou, Zhaozhong, Feng, Kaiping, Yuan, JulongVolume:
11
Year:
2015
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2015.071927
File:
PDF, 4.39 MB
english, 2015