Proton beam writing: a progress review

Proton beam writing: a progress review

Kan, Jeroen A. Van, Bettiol, Andrew A., Ansari, Kambiz, Teo, Ee Jin, Sum, Tze Chien, Watt, Frank
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Volume:
1
Year:
2004
Language:
english
Journal:
International Journal of Nanotechnology
DOI:
10.1504/ijnt.2004.005980
File:
PDF, 1.33 MB
english, 2004
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