Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity
Shi, Zhendong, Fang, Liang, Zhou, ChongxiVolume:
12
Year:
2015
Language:
english
Journal:
International Journal of Nanotechnology
DOI:
10.1504/ijnt.2015.071794
File:
PDF, 2.12 MB
english, 2015