A simple estimate of deposited energy and concentration...

Applied Physics A: Materials Science & Processing 1994 / 06 Vol. 58; Iss. 6

A simple estimate of deposited energy and concentration profiles in films produced by Ion-Assisted Physical Vapour Deposition

K. G. Grigorov, D. Bouchier, G. I. Grigorov, J-L Vignes, J-P Langeron
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
58
Language:
english
Pages:
4
DOI:
10.1007/bf00348175
Date:
June, 1994
File:
PDF, 340 KB
english, 1994
Conversion to is in progress
Conversion to is failed