Study on the strain in a silicon microchannel plate by micro-Raman analysis
Xu, Shaohui, Fang, Jiabing, Wu, Dajun, Zhang, Chi, Zhu, Yiping, Xiong, Dayuan, Wang, Lianwei, Yang, Pingxiong, Chu, Paul KVolume:
31
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/31/5/055010
Date:
May, 2016
File:
PDF, 1.49 MB
english, 2016