Measurement and reliability issues in resonant mode cantilever for bio-sensing application in fluid medium
Kathel, G, Shajahan, M S, Bhadra, P, Prabhakar, A, Chadha, A, Bhattacharya, EVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095007
Date:
September, 2016
File:
PDF, 1.33 MB
english, 2016