SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV - Micromechanics for actuators via deep x-ray lithography
Guckel, Henry, Skrobis, Kenneth J., Christenson, Todd R., Klein, J., Patterson, David O.Volume:
2194
Year:
1994
Language:
english
DOI:
10.1117/12.175836
File:
PDF, 1.08 MB
english, 1994