![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Chemical-mechanical polishing: enhancing the manufacturability of MEMS
Sniegowski, Jeffry J., Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251237
File:
PDF, 1.00 MB
english, 1996