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SPIE Proceedings [SPIE Smart Structures and Materials '97 - San Diego, CA (Monday 3 March 1997)] Smart Structures and Materials 1997: Smart Electronics and MEMS - Application of PZT thin films in microelectromechanical systems
Polla, Dennis L., Varadan, Vijay K., McWhorter, Paul J.Volume:
3046
Year:
1997
Language:
english
DOI:
10.1117/12.276603
File:
PDF, 263 KB
english, 1997