SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microelectronic Structures and MEMS for Optical Processing III - Multichannel fiber optic switches based on MOEM systems
Gloeckner, Steffen, Goering, Rolf, Goetz, Bernt, Motamedi, M. Edward, Herzig, Hans PeterVolume:
3226
Year:
1997
Language:
english
DOI:
10.1117/12.284577
File:
PDF, 911 KB
english, 1997