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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Production of movable metallic microstructures by aligned hot embossing and reactive ion etching
Roetting, Oliver, Koehler, Bernd, Reuther, Frank-Joachim, Blum, Hartmut, Bacher, Walter, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341173
File:
PDF, 2.74 MB
english, 1999