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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Modeling and simulating optical MEMS using Chatoyant
Kurzweg, Timothy P., Levitan, Steven P., Marchand, Philippe J., Martinez, Jose A., Prough, Kurt R., Chiarulli, Donald M., Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, KaraVolume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341207
File:
PDF, 3.30 MB
english, 1999