SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components - Advanced industrial metrology used for qualification of high-quality optical materials
Engel, Axel, Westenberger, Gerhard, Bartelmess, L., Sohr, Oliver, Haspel, Rainer, Morsen, Ewald, Duparr, Angela, Singh, BhanwarVolume:
4779
Year:
2002
Language:
english
DOI:
10.1117/12.451741
File:
PDF, 1.15 MB
english, 2002