SPIE Proceedings [SPIE Photomask Technology 2002 -...

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SPIE Proceedings [SPIE Photomask Technology 2002 - Monterey, CA (Tuesday 1 October 2002)] 22nd Annual BACUS Symposium on Photomask Technology - Manufacturability evaluation of model-based OPC masks

Jang, Sung-Hoon, Zinn, Sonny Y., Ki, Won-Tai, Choi, Ji-Hyun, Jeon, Chan-Uk, Choi, Seong-Woon, Yoon, Hee-Sun, Sohn, Jung-Min, Oh, Yong-Ho, Lee, Jai-Cheol, Lim, Sungwoo, Grenon, Brian J., Kimmel, Kurt R
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Volume:
4889
Year:
2002
Language:
english
DOI:
10.1117/12.468093
File:
PDF, 723 KB
english, 2002
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