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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MOEMS and Miniaturized Systems III - Fabrication of micromachined focusing mirrors with seamless reflective surface
Hou, Max Ti-Kuang, Liao, Ke-Min, Yeh, Hong-Zhen, Cheng, Bo-Wen, Hong, Pei-Yuan, Chen, Rongshun, Smith, James H.Volume:
4983
Year:
2003
Language:
english
DOI:
10.1117/12.472909
File:
PDF, 679 KB
english, 2003