SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II - Electrostatic beam actuator for switching applications fabricated by Ni-microelectroplating and thermal postprocessing

Becker, Mike, Benecke, Wolfgang, Hannemann, Birgit, Henning, Thomas, Janson, Siegfried W.
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Volume:
4981
Year:
2003
Language:
english
DOI:
10.1117/12.476281
File:
PDF, 267 KB
english, 2003
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