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SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Selective metal deposition using low-dose focused ion-beam patterning
Kubena, Randall L., Stratton, Fred P., Mayer, Thomas M., Bondur, James A., Turner, Terry R.Volume:
1392
Year:
1991
Language:
english
DOI:
10.1117/12.48964
File:
PDF, 263 KB
english, 1991