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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X - Spherical and non-spherical high fill-factor microlens arrays fabricated by polymer coating on isotropically etched quartz
Nam, Minwoo, Garcia-Blanco, Sonia, Ramesham, Rajeshuni, Oh, Haekwan, Kim, Geunyoung, Seo, Hyunwoo, Song, Yotak, Yang, Sang Sik, Lee, Kee-KeunVolume:
7928
Year:
2011
Language:
english
DOI:
10.1117/12.876092
File:
PDF, 1.43 MB
english, 2011