UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist
Malekabadi, Ali, Paoloni, ClaudioVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095010
Date:
September, 2016
File:
PDF, 1.42 MB
english, 2016