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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] MOEMS and Miniaturized Systems XIII - High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Piyawattanametha, Wibool, Park, Yong-Hwa, Schmidt, Jan-Uwe, Dauderstaedt, Ulrike A., Duerr, Peter, Friedrichs, Martin, Hughes, Thomas, Ludewig, Thomas, Rudloff, Dirk, Schwaten, Tino, Trenkler, DanielaVolume:
8977
Year:
2014
Language:
english
DOI:
10.1117/12.2036533
File:
PDF, 1.44 MB
english, 2014