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SPIE Proceedings [SPIE Environmental and Industrial Sensing - Boston, MA (Sunday 5 November 2000)] Advanced Environmental and Chemical Sensing Technology - Microfluidics in environmental monitoring: a proposed mechanism for anisotropic wet chemical etching of c-Si
Korch, Rob, Karanassios, Vassili, Vo-Dinh, Tuan, Buettgenbach, StephanusVolume:
4205
Year:
2001
Language:
english
DOI:
10.1117/12.417438
File:
PDF, 56 KB
english, 2001