SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems
Jang, Yun-Ho, Ma, Zhichun, Jin, Guofan, Lee, Kook-Nyung, Shin, Dong-Sik, Chen, Xuyuan, Lee, Yoon-Sik, Kim, Yong-KweonVolume:
5641
Year:
2004
Language:
english
DOI:
10.1117/12.574010
File:
PDF, 1.95 MB
english, 2004