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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 26 February 2006)] Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Micro-patterning on cellulose EAPap for biodegradable MEMS
Yun, Sungryul, Varadan, Vijay K., Bae, Seung-Hun, Yang, Sangyeol, Kim, JaehwanVolume:
6172
Year:
2006
Language:
english
DOI:
10.1117/12.658351
File:
PDF, 417 KB
english, 2006