SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Soft X-Ray Lasers and Applications VII - Interferometric lithography with sub-100-nm resolution using a tabletop 46.9-nm laser
Wachulak, P. W., Tallents, Gregory J., Dunn, James, Patel, D., Capeluto, M. G., Menoni, C. S., Rocca, J. J., Marconi, M. C.Volume:
6702
Year:
2007
Language:
english
DOI:
10.1117/12.732900
File:
PDF, 561 KB
english, 2007