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Investigation of Leakage Current Mechanisms in La2O3/SiO2/4H-SiC MOS Capacitors with Varied SiO2Thickness
Wang, Yucheng, Jia, Renxu, Zhao, Yanli, Li, Chengzhan, Zhang, YumingVolume:
45
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-016-4760-6
Date:
November, 2016
File:
PDF, 649 KB
english, 2016