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SPIE Proceedings [SPIE Semiconductors '92 - Somerset, NJ (Sunday 22 March 1992)] Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication - In-situ x-ray studies of OMVPE growth
Fuoss, Paul H., Lamelas, Frank J., Imperatori, P., Kisker, David W., Stephenson, G. Brian, Brennan, Sean, Malik, Roger J., Palmstrom, Chris J., Bedair, Salah M., Craighead, Harold G., Kubena, RandallVolume:
1676
Year:
1992
Language:
english
DOI:
10.1117/12.137660
File:
PDF, 479 KB
english, 1992