SPIE Proceedings [SPIE Microelectronic Processing '92 - San...

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SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Microelectronics Manufacturing and Reliability - Etching-related reverse short channel effect in buried channel P-MOSFET

Chang, Chorng P., Ng, K. K., Lindenberger, W. S., Kook, Taeho H., Preuninger, Fred N., Kornblit, Avi, Vasquez, Barbara, Sabnis, Anant G., MacWilliams, Kenneth P., Woo, Jason C.
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Volume:
1802
Year:
1993
Language:
english
DOI:
10.1117/12.139348
File:
PDF, 614 KB
english, 1993
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