![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - Thin-gate dielectric films grown in N<sub>2</sub>O and O<sub>2</sub> using rapid thermal oxidation
Grant, John M., Hsieh, Tzu Y., Shannon, Victoria L., Chen, Fusen E., Murarka, Shyam P.Volume:
2335
Year:
1994
Language:
english
DOI:
10.1117/12.186063
File:
PDF, 756 KB
english, 1994