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SPIE Proceedings [SPIE 1994 International Symposium on Optical Interference Coatings - Grenoble, France (Sunday 5 June 1994)] Optical Interference Coatings - Control of silicon oxynitrides refractive index by reactive-assisted ion beam sputter deposition
Ida, Michel, Chaton, Patrick, Rafin, B., Abeles, FlorinVolume:
2253
Year:
1994
Language:
english
DOI:
10.1117/12.192113
File:
PDF, 323 KB
english, 1994