SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - SiO 2 -glass drilling by short-pulse CO 2 laser with controllable pulse-tail energy
Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, Uno, Kazuyuki, Yamamoto, Takuya, Watanabe, Miyu, Akitsu, Tetsuya, Jitsuno, TakahisaVolume:
9735
Year:
2016
Language:
english
DOI:
10.1117/12.2211565
File:
PDF, 1.20 MB
english, 2016