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SPIE Proceedings [SPIE International Conference on Coherent and Nonlinear Optics - St. Petersburg, Russia (Tuesday 27 June 1995)] Atomic and Quantum Optics: High-Precision Measurements - High-precision submicrometer length measurements by laser interference diffractometry
Abramova, Larisa Y., Baratov, Victor M., Vitushkin, Leonid F., Vitushkin, Artem L., Korotkov, Vladimir I., Pul'kin, Sergey, Bagayev, Sergei N., Chirkin, Anatoly S.Volume:
2799
Year:
1996
Language:
english
DOI:
10.1117/12.239865
File:
PDF, 374 KB
english, 1996