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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Analytical techniques for examining reliability and failure mechanisms of barrier-coated encapsulated silicon pressure sensors exposed to harsh media
Bitko, Gordon, Monk, David J., Maudie, Theresa, Stanerson, Dennis, Wertz, John, Matkin, Jeanene, Petrovic, Slobodan, Chau, Kevin H., Roop, Ray M.Volume:
2882
Year:
1996
Language:
english
DOI:
10.1117/12.250710
File:
PDF, 2.56 MB
english, 1996