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SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II - Source drain leakage: a potential problem in submicron CMOS devices
Hong, Yeoh E., Keshavarzi, Ali, Tay, Martin, Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-DieterVolume:
2874
Year:
1996
Language:
english
DOI:
10.1117/12.250831
File:
PDF, 409 KB
english, 1996