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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Device Technology - Improvement of edge leakage in PBL-isolated SOI NMOSFETs

Burnett, David, Lien, Mitch, Baker, Kelly, Rodder, Mark, Tsuchiya, Toshiaki, Burnett, David, Wristers, Dirk
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Volume:
3212
Year:
1997
Language:
english
DOI:
10.1117/12.284598
File:
PDF, 282 KB
english, 1997
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