![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Multilevel Interconnect Technology II - Explosive phenomenon of AlCu/TiN and W-plugs multilevel interconnect system
Yang, J. D., Lin, Chuan-Chieh A., Yen, Anthony, Chen, Sen-Fu, Chang, Chao-Hsin, Wu, Jie-Shin, Wu, J. R., Graef, Mart, Patel, Divyesh N.Volume:
3508
Year:
1998
Language:
english
DOI:
10.1117/12.324039
File:
PDF, 1.57 MB
english, 1998