SPIE Proceedings [SPIE Microelectronic Manufacturing Technologies - Edinburgh, United Kingdom (Wednesday 19 May 1999)] In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing - Layout-based manufacturability assessment and yield prediction methodology
Simon, Paul, Veelenturf, Kees, van Adrichem, Paul, de Jong, Jeroen, Sprij, Stanley, Maly, Wojciech P., Amberiadis, Kostas, Kissinger, Gudrun, Okumura, Katsuya, Pabbisetty, Seshu, Weiland, Larg H.Volume:
3743
Year:
1999
Language:
english
DOI:
10.1117/12.346928
File:
PDF, 312 KB
english, 1999