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SPIE Proceedings [SPIE 15th Int'l Optics in Complex Sys. Garmisch, FRG - Garmisch, Federal Republic of Germany (Sunday 5 August 1990)] Optics in Complex Systems - Ellipsometry of diffracted light
Humlicek, Josef, Vojtechovsky, Karel, Drimalova, Irena, Bochnickova, Eva, Lanzl, F., Preuss, H.-J., Weigelt, G.Volume:
1319
Year:
1990
Language:
english
DOI:
10.1117/12.34909
File:
PDF, 47 KB
english, 1990