SPIE Proceedings [SPIE Symposium on Micromachining and...

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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Materials and Device Characterization in Micromachining II - Micro cycloid-gear system fabricated by multiexposure LIGA technique

Hirata, Toru, Chung, Song-Jo, Hein, Herbert, Akashi, Tomoyuki, Mohr, Juergen, Vladimirsky, Yuli, Friedrich, Craig R.
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Volume:
3875
Year:
1999
Language:
english
DOI:
10.1117/12.360468
File:
PDF, 3.87 MB
english, 1999
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