SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] Applications and Science of Neural Networks, Fuzzy Systems, and Evolutionary Computation II - Neural nets for modeling, optimization, and control in semiconductor manufacturing
Mahajan, Roop L., Bosacchi, Bruno, Fogel, David B., Bezdek, James C.Volume:
3812
Year:
1999
Language:
english
DOI:
10.1117/12.367694
File:
PDF, 653 KB
english, 1999