![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Reliability, Testing, and Characterization of MEMS/MOEMS - Fracture toughness and fatigue investigations of polycrystalline silicon
Bagdahn, Joerg, Schischka, Jan, Petzold, Matthias, Sharpe, Jr., William N., Ramesham, RajeshuniVolume:
4558
Year:
2001
Language:
english
DOI:
10.1117/12.442998
File:
PDF, 556 KB
english, 2001