SPIE Proceedings [SPIE Micromachining and Microfabrication...

  • Main
  • SPIE Proceedings [SPIE Micromachining...

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Reliability, Testing, and Characterization of MEMS/MOEMS - Fracture toughness and fatigue investigations of polycrystalline silicon

Bagdahn, Joerg, Schischka, Jan, Petzold, Matthias, Sharpe, Jr., William N., Ramesham, Rajeshuni
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4558
Year:
2001
Language:
english
DOI:
10.1117/12.442998
File:
PDF, 556 KB
english, 2001
Conversion to is in progress
Conversion to is failed