![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - MEMS Max: a new full- 3D MEMS-featured rf-FEM analysis environment
Mohamed, Firas, Affour, Bachar, Despreaux, Stephane, Guillon, B., Giroud, Patrick, Courtois, Bernard, Karam, Jean Michel, Markus, Karen W., Michel, Bernd, Mukherjee, Tamal, Walker, James A.Volume:
4755
Year:
2002
Language:
english
DOI:
10.1117/12.462837
File:
PDF, 1.00 MB
english, 2002