SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Saturday 25 January 2003)] Photon Processing in Microelectronics and Photonics II - Heat-affected zone of metals ablated with femtosecond laser pulses
Hirayama, Yoichi, Obara, Minoru, Pique, Alberto, Sugioka, Koji, Herman, Peter R., Fieret, Jim, Bachmann, Friedrich G., Dubowski, Jan J., Hoving, Willem, Washio, Kunihiko, Geohegan, David B., Traeger,Volume:
4977
Year:
2003
Language:
english
DOI:
10.1117/12.479242
File:
PDF, 217 KB
english, 2003