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SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Optomechanics and Dimensional Stability - Work-induced stress and long-term stability in optically polished silicon
Bender, Jonathan W., Wahl, Roger W., Paquin, Roger A., Vukobratovich, DanielVolume:
1533
Year:
1991
Language:
english
DOI:
10.1117/12.48862
File:
PDF, 678 KB
english, 1991