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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Characterization of front- to backwafer alignment and bulk micromachining using electrical overlay test structures
van Zeijl, Henk W., Chiao, Jung-Chih, Varadan, Vijay K., Slabbekoorn, John, Can, CarlesVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.499104
File:
PDF, 659 KB
english, 2003