SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - At-wavelength metrology on Sc-based multilayers for the UV and water window
Schaefers, Franz, Duparre, Angela, Singh, Bhanwar, Yulin, Sergiy A., Feigl, Torsten, Kaiser, NorbertVolume:
5188
Year:
2003
Language:
english
DOI:
10.1117/12.505695
File:
PDF, 501 KB
english, 2003