SPIE Proceedings [SPIE Optical Science and Technology,...

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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - At-wavelength metrology on Sc-based multilayers for the UV and water window

Schaefers, Franz, Duparre, Angela, Singh, Bhanwar, Yulin, Sergiy A., Feigl, Torsten, Kaiser, Norbert
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Volume:
5188
Year:
2003
Language:
english
DOI:
10.1117/12.505695
File:
PDF, 501 KB
english, 2003
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