SPIE Proceedings [SPIE Madras - DL tentative - Madras, India (Saturday 1 February 1992)] Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits - Photostable amorphous-silicon films by low-pressure chemical vapour deposition
Sharma, K. K., Manfredotti, ClaudioVolume:
1523
Year:
2013
Language:
english
DOI:
10.1117/12.56990
File:
PDF, 296 KB
english, 2013