SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Design and Process Integration for Microelectronic Manufacturing III - Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM
Kitamura, Tadashi, Liebmann, Lars W., Kubota, Kazufumi, Hasebe, Toshiaki, Sakai, Futoshi, Nakazawa, Shinichi, Vohra, Neeti, Yamamoto, Masahiro, Inoue, MasahiroVolume:
5756
Year:
2005
Language:
english
DOI:
10.1117/12.599467
File:
PDF, 320 KB
english, 2005