SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Device and Process Technologies for Microelectronics, MEMS, and Photonics IV - Lithography of diamond-like-carbon (DLC) films for use as masters in soft-lithography
Chiao, Jung-Chih, Watson, Gregory S., Myhra, Sverre, Dzurak, Andrew S., Jagadish, Chennupati, Watson, Jolanta A., Thiel, David V.Volume:
6037
Year:
2005
Language:
english
DOI:
10.1117/12.638361
File:
PDF, 371 KB
english, 2005