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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - A critical comparison and development of nano-mechanical characterization of MEMS/NEMS thin film materials
He, Johnny H., Tanner, Danelle M., Ramesham, Rajeshuni, Le, H. R., Luo, J . K., Fu, Y. Q., Moore, D. F.Volume:
6111
Year:
2006
Language:
english
DOI:
10.1117/12.647295
File:
PDF, 560 KB
english, 2006